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Changeable SPM measuring heads basement with opportunity of installation of an objective. Manual X,Y stage for positioning of the measuring head relative to the objective. Range of head positioning 5x5 mm. Manual X, Y stage for sample positioning in the range 5x5 mm, positioning resolution 5 um. X,Y sample scanning stage. Scan range 100x100 (+/-10%)um. Closed loop operation with the capacitance sensors. Adjustable viewing mirror for the up-right optics CCD04o, CCD05o. Z scanner for objective Zpositioning, range 100mkm. For Olympus microscopes.
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