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SPL Controller Specification
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Parameter |
Value |
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Up to 4 different images with the resolution up to 4000x4000 pixels can be acquired during one scanning cycle |
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3 ADC:
2 ADC for signal measurement, 1 ADC for feedback control |
16-bit ADC with preamplifier 1õ, 10õ, 100õ, 1000õ;
Software controlled low-pass filters 100Hz,300Hz,1kHz,3kHz,10kHz,30kHz (for two ADCs) |
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Multiplexing of external inputs |
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Number of external inputs |
5 (Ex1, Ex2, Ex3, Ex20, Ex21) |
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Number of external inputs, which can be applied to the synchronous detector |
1 (Ex1) |
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Phase sensitivity of synchronous detector |
0,01 degree in 1kHz bandwidth |
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Phase detector sensitivity |
PHASE1 - 0,04 degree,
PHASE2 - 0,04 degree |
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Integrated two-channel pulse counter |
Impulse frequency up to 10MHz |
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XYZ scanner driving voltage |
High-voltage outputs: X,-X,Y,-Y,Z,-Z at -150V to +150V |
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DACs: |
Three composite DACs for X,Y,Z control
one 16-bit DAC for Bias Voltage control
one 12-bit DAC for user output |
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XY RMS noise in 1000 Hz bandwidth |
0.4 ppm RMS (0.2 mV RMS) |
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Z RMS noise in 1000 Hz bandwidth |
0.4 ppm RMS (0.2 mV RMS) |
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Integrated demodulator for X,Y,Z capacitive sensors
Open/Closed-loop mode for X,Y control |
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Generator Frequency Range |
DC – 5MHz |
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Signal registration channel band pass (Deflection) |
1 kHz-5 MHz |
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Signal registration band pass (Lateral Force) |
1 kHz – 5 MHz |
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Bias Voltage channel band pass |
DC-500 kHz |
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Modulating signals supply |
To the probe (external output);
High-voltage X,Y, Z channels;
Bias Voltage;
External output (2) |
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10-input software controlled feedback, including Deflection, Lateral Force, Bias Voltage, etc. |
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4-input 5 MHz Lock-In with I (projection),Q (projection), R (module) outputs |
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Phase detector |
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Independent 4-input RMS detector |
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Number of generators for modulation |
2 |
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Number of additional generators for synchronous detectors |
2 |
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Max load capacitance along Z |
100 nF |
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Max load capacitance along XY |
50 nF |
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Stepper motor control outputs |
Two DACs, 20V peak-to-peak, max current 130 mA |
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Additional digital inputs/outputs |
6 |
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Flexible system controller based on DSP, FPGA |
For example, it’s possible to re-program digital inputs/outputs. |
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Automatic system hardware identification, control of low speed external devices (I2C bus) |
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Max. cable length between the controller and SPM base or measuring heads |
2 m |
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Voltage |
110/220V |
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Power consumption |
Less than 80W |
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Dimensions |
445x160x500 mm3 |
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Weight |
16 kg |
