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First Nanotechnology Facility on the NANOFAB platform
28.12.2005On the eve of New Year NT-MDT Co. puts on the market new product – Nanotechnology Facility NANOFAB 100.
NANOFAB 100 is the first in line of NANOFAB platform based Nanotechnology Facilities.
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By replacing probe sensor assemblies NANOFAB 100 allows to realize the all main SPM techniques on 100 mm wafers. |
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NANOFAB 100 includes the three ultra high vacuum
(10-11 Torr) chambers – analytical, loading and chamber of replaceable probe sensor assemblies. |
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