Nanotechnology Facilities on the NanoFab 100 platform

NanoFab 100 platform

NanoFab 100 is a modular platform, which is developed to assemble nanotechnology facilities (NTF) with the cluster arrangement of their modules, including systems that are capable of treating substrates as big as 100 mm using batch and local techniques. The NTF clusters are linked into the technology chain by means of special intermediate modules, which are used both to transport and to store samples. All this makes it possible to assemble “Nano Factories” to fabricate fully functional nano-structures, nano-devices and nano-systems.

Applications

Fields of application of the NTF NanoFab 100 cover almost all areas of the nanotechnology research and development that are linked with solid-body nano-materials, nano-structures and nano-devices. The spectrum of NanoFab 100’s capabilities expands from fundamental research to the development of single technology methods and to modeling nano-electronics devices. In addition, the employed scheme of arrangement, the control system and the well-developed transport system of the NanoFab 100 make it possible to use the NTF for low quantity production of nano-structures and nano-devices. The coordinate-linked system of substrate positioning makes it possible to create complex multicomponent 3D nano-devices by using sequential nanotechnology operations with the nanometer resolution. The NTF NanoFab 100’s area of applications has especial significance for the development of modern silicon electronics, which has already become part of practical nano-electronics.

Structure of NanoFab 100

Broad capabilities of the NanoFab 100 result from the thoroughly elaborated cluster arrangement scheme – a special ultra-high vacuum transportation robot provides all interconnections between modules united into a cluster. This minimizes the travel time required to transfer samples in between operations and, therefore, provides better preservation of their surfaces, which is crucial in nanotechnologies. The intermediate modules, which provide the process of translation of substrates, are equipped with rotation devices and they allow performing complex technology cycles, including batch and local processes. In addition they provide all necessary control, measurement and analytical procedures.

The intermodular transport system and intermediate modules, which are used to store substrates in between operations, allow a single NTF NanoFab 100 to realize several nanotechnology cycles on different substrates simultaneously. Therefore several research groups can use the same NTF at once. Apart from modules, the NanoFab 100 comprises separate auxiliary, control, measurement, and analytical devices. Those devices can be used with modules of NanoFab 100 via special ports, available in the modules in a sufficient number. Modules of the NanoFab 100 platform can operate both as an integral part of a NTF and autonomously. In some cases it is possible to run them using auxiliary loading devices or loading modules. NanoFab 100 is an open and permanently developing platform – several modules based on newest techniques are being under development.

Uniqueness

The components of the platform, its transport and control systems and its flexibility to assemble various nanotechnology facilities make the NanoFab 100 platform to be unique with no