The cluster arrangement scheme is used to build nanotechnology facilities – all functionally similar modules are assembled around a radial transportation robot. The modules of the same cluster have the same operating vacuum level.

The transport and vacuum systems are controlled from the central control post and all the information about the system status and the sample status is available to the operator in real time. United therefore into a cluster modules operate in parallel, which allows processing up to 5 samples within the same cluster simultaneously.

The NTF clusters are linked into technology chains by means of special intermediate modules, which are used both to transport and to store samples. New components are added to the platform NanoFab 100 and the existing components of the platform are constantly improved. Therefore the number of clusters increases and their capabilities become broader. All this makes it possible to use the NanoFab 100 platform as a basis for “Nano Factories” to fabricate fully functional nano-structures, nano-devices and nano-systems.

The following clusters are recommended as a basis to form nanotechnology facilities:

• Ultra-high vacuum cluster for local techniques
• High vacuum cluster for local and batch techniques
• Molecular beam epitaxy module cluster
• Plasma techniques cluster