STM/ AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Phase Imaging/Force Modulation/ Adhesion Force Imaging/ Magnetic Force Microscopy/ Electrostatic Force Microscopy/ Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Force and Current), STM

Scanning by sample

Scanning by probe^*

Ambient environment

Up to 40 mm in diameter, 
to 15 mm in height

Up to 100 mm in diameter,
up to 15 mm in height

Heating or cooling

10x10x1.5 mm
15x12x1.5 mm

Up to 15x17x1.5 mm

5x5 mm

readable resolution-5 um
sensitivity-2 um

Temperature control

Range

From -30°C
to +80°C/RT – +150 C

From RT to 300°C

Stability

±0.005 (typically),
±0.01°C

±0.01°C (typically),
±0.02°C

Scan range

-30°C - +80°C

10x10x5 um

-

Ambient conditions/
RT - +150°C

100x100x10 um
3x3x2.6um

50x50x5um

RT - +300°C

-

50x50x5um

DualScan™ mode

Up to 150x150x15 um** (DualScan™ mode)

Thermal drift***
(tipically)

XY

15 nm/°C

Z

10 nm/°C

0.1%

0.15%

With sensors

0.04 nm(typically),
0.06 nm

0.06 nm(typically),
0.07 nm

Without sensors

0.03 nm

0.05 nm

With sensors

0.2 nm (typically),
0.3 nm (XY 100 um)
0.025 nm(typically),
0.04 nm (XY 10 um)

0.1 nm (typically),
0.2 nm 

Without sensors

0.02 nm(XY 100 um),
0.002 nm(XY 10 um),
0.001 nm (XY 3 um)

0.01 nm 

±0.5%

±1.2%

Optical resolution

1 um/3 um

3 um

Field of view

4.5-0.4 mm

2.0-0.4 mm

Continuous zoom

available

available

Vibration isolation

Active

 0.7-1000 Hz

Passive

above 1 kHz