|
Scanning Probe Microscopy |
|
In air&liquid: AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Phase Imaging/ Force Modulation/ Adhesion Force Imaging/ Lithography: AFM (Force)
In air only: STM/ Magnetic Force Microscopy/ Electrostatic Force Microscopy/ Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Current), STM/ AFAM (optional) |
|
Specification |
Scan type |
| Scanning by sample |
Scanning by probe* |
| Sample size |
Up to 40 mm in diameter,
to 15 mm in height |
Up to 100 mm in diameter,
up to 15 mm in height |
| Sample weight |
Up to 100 g |
Up to 300 g |
| XY sample positiniong |
5x5 mm |
| Positioning resolution |
readable resolution-5 um
sensitivity-2 um |
|
Scan range |
100x100x10 um
3x3x2,6 um |
100x100x10 um
50x50x5 um |
|
Up to 200x200x20 um**(DualScanTMmode) |
Non linearity, XY
(with closed loop sensors) |
 0.1%
|
0.15% |
Noise level, Z
(RMS in bandwidth 1000Hz) |
With sensors |
0.04 nm (typically),
 0.06 nm |
0.06 nm (typically),
 0.07 nm |
|
Without sensors |
0.03 nm |
0.05 nm |
Noise level, XY***
(RMS in bandwidth 200Hz) |
With sensors |
0.2 nm (typically),
0.3 nm (XY 100 um) |
0.1 nm (typically),
0.2 nm (XY 50 um) |
|
Without sensors |
0.02 nm (XY 100 um),
0.001 nm (XY 3 um) |
0.01 nm (XY 50 um), |
Linear dimension estimation error
(with sensors) |
±0.5% |
±1.2% |
| Optical viewing system |
Optical resolution |
1 um
(0.4 um optional, NA 0.7)**** |
3 um |
|
Field of view |
4.5-0.4 mm |
2.0-0.4 mm |
|
Continuous zoom |
available |
available |
|
Vibration isolation |
Active |
0.7-1000 Hz |
|
Passive |
above 1 kHz |
contacts
