Equipped with a replaceable scanner with integrated capacitance sensors. A scan range of 100x100x12 um is available.

    XY nonlinearity: 0.05% of Peak-to-Peak by 2 value, after correction.

    Position repeatability in the X-Y plane is maintained with an accuracy of 10-20 nm in full scan range.

    The DualScan mode is performed with the use of the replaceable lower scanner (100x100x12 um) and another (100x100x10 um) upper scanner, which gives the total scan range of 200x200x22 um.

    The PNL controller and the mechanical parts of the PNL NTEGRA can operate in high-frequency modes, up to  5 MHz.  This makes it possible to use the system both for  AFAM applications and for operations with high-frequency cantilevers.

    This system can be used in research of high-resistance materials such as thin dielectric layers on semiconductors, DLC and piezo-films, conductive polymers etc.