|
Parameters |
Type of scanning |
|
Scanning by sample |
Scanning by probe |
|
Sample size |
Up to 40x40õ10 mm
Up to 12x12x2 mm
with the liquid cell use |
Up to 100x100õ20 mm and unlimited for measuring head used for stand alone operation |
|
Scanners |
3x3x2.6 um (±10%);
10x10x4 um (±10%),
50x50x5 um (±10%) |
50x50x5 um (±10%);
100x100x7 um (±10%);
100x100x10 um (±10%) (only for Shear Force) |
|
Min. scanning step(DAC) |
0.0004 nm;
0.0011 nm;
0.006 nm |
0.006 nm;
0.012 nm;
0.012 nm |
| SPM heads |
|
|
AFM
STM: 30 pA-50 nA, RMS noise 4 pA
(standard preamplifier);
10 pA-5 nA, PMS noise 1.5 pA
(low current preamplifier) |
AFM
Shear Force |
| Optical viewing system |
|
Resolution
Numerical aperture
CCD
Horizontal field of view |
1 um
0.28
îò 230x äî 2900x
îò 1.2 äî 0.1 mm |
|
XY sample positioning |
5õ5 mm |
|
Positioning resolutin |
readable resolution-5 um
sensitivity-2 um |
|
Heating |
130 Ñ |
|
Vibration isolation |
Active vibration isolation system:
Active damping (0.6-100 Hz),
>100 Hz - passive damping
Electric shielding and acoustic isolation is provided by the special cast metall hood |
contacts
