AFM Lithography by Local Probe Oxidation: AFM Lithography by Local Probe Oxidation

AFM Lithography by Local Probe Oxidation

Mode:	AFM Oxidation Lithography
Scan size:	2.5x2.5 µm

AFM nanolithography image obtained by electrical local probe oxidation technique on ultrathin titanium film.

Image courtesy of S. Lemeshko, NT-MDT.