AFM Lithography by Local Probe Oxidation: AFM Lithography by Local Probe Oxidation

AFM Lithography by Local Probe Oxidation

Mode:	AFM Oxidation Lithography
Scan size:	2.0x3.0 µm

Portrait of Zhores Alferov, russian Nobel prize winner in Physics, 2000. AFM nanolithography image obtained by electrical local probe
oxidation technique on ultrathin titanium film.

Image courtesy of Alexander Alexeev, NT-MDT Co.