AFM Lithography by Local Probe Oxidation: AFM Lithography by Local Probe Oxidation

AFM Lithography by Local Probe Oxidation

Mode:	AFM Oxidation Lithography
Scan size:	2.3x3.3 µm

Portrait of N. W. Timofeeff-Ressovsky, founder of the russian genetics. AFM nanolithography image obtained by electrical local probe oxidation technique on ultrathin titanium film.

Image courtesy of Igor Fedorov, NT-MDT Co.