AFM Lithography by Local Probe Oxidation: AFM Lithography by Local Probe Oxidation

AFM Lithography by Local Probe Oxidation

Mode:	AFM Oxidation Lithography
Scan size:	2.5x5.0 A

AFM nanolithography image obtained by electrical local probe oxidation technique on ultrathin titanium film.

Image courtesy of A. Efimov, NT-MDT Co.