AFM Lithography by Local Probe Oxidation

AFM Lithography by Local Probe Oxidation
Mode:AFM Oxidation Lithography
Scan size:3.2x3.2x0.02 µm
Res. frequency:275 kHz

AFM nanolithography image obtained by electrical local probe oxidation technique on GaAs film.


Image courtesy of S. Leesment, NT-MDT Co.