AFM Lithography by Local Probe Oxidation

AFM Lithography by Local Probe Oxidation
Mode:AFM Oxidation Lithography
SPM Model:Solver P47-PRO
Scan size:4.4x5.2 µm
Res. frequency:135.9 kHz
Source MDT-file:download (699.34 Kb)

 

AFM nanolithography image obtained by electrical local probe oxidation technique on GaAs surface.

Image courtesy of Eugeny Kuznetsov , NT-MDT, Moscow, Russia, kuznetsov@ntmdt.ru