AFM Lithography by Local Probe Oxidation

AFM Lithography by Local Probe Oxidation
Mode:AFM Oxidation Lithography
SPM Model:NTEGRA Aura
Scan size:1.6x2.0 µm

AFM nanolithography image obtained by electrical local probe oxidation technique on ultrathin titanium film on silicon wafer. NTEGRA Aura with DCP11 probe was used.

Image courtesy of S. Krasnoborodko, NT-MDT.