AFM Lithography by Local Probe Oxidation

Thin Ti film
Mode:AFM Oxidation Lithography
SPM Model:Solver P47-PRO
Scan size:2x2 µm
Source MDT-file:download (133.38 Kb)

The image was made by local anodic oxidation nanolithography of a thin Ti film on SPM Solver P47 Pro in semicontact mode, by using NSG 11 cantilevers with conducting W2C covering, at relative humidity of 70 %.

Image courtesy of Smirnov V.A., Taganrog Technological Institute Of Southern Federal University.