Epitaxial structures

Surface of Si(111)
Mode:Semicontact mode
SPM Model:Solver P47H-PRO
Scan size:17x17 µm
Source MDT-file:download (512.49 Kb)

Spiral stage on the surface of Si(111) formed as the result of a beat of the screw dislocation, and 2D negative islands (depth — 0.31 nm; lateral sizes — tens of nanometer) after thermal annealing of the silicon in oxygen atmosphere.

Image and sample courtesy of Rodyakina, Institute of Semiconductor Physics, Moscow, Russia.