NANOFAB 100 platform: SPM GIS module
The purpose of the SPM module with a system of gas injectors (SPM GIS) is to perform nano-scale operations for both fabricating and investigating structures by means of probe techniques.
The injector system for 5 reservoirs, equipped with a micro-positioning device for output nozzles and with a temperature controller, gives the opportunity to set a desirable chemical environment at the contact area between the SPM probe and sample. This system perfectly combines the ability of the SPM to operate on local areas with the lightness of the gas injectors that create the required chemical conditions without disturbing the process purity (i.e. high vacuum).
