NANOFAB 100 platform: UHV SPM module

UHV SPM module is an analytical instrument designed for the wafer research and quality control (wafers with a diameter up to 100 mm). It can perform more than 40 measurement techniques in ultraclean UHV conditions (down to 10^-10 mb). Fully automated probe exchange system provides easy probe exchange without breaking ultra-high vacuum. The precision XY-manipulator makes it possible to investigate fabricated nano-objects.