NANOFAB 100 platform: UHV cluster for nanolocal techniques

Ultra-high vacuum cluster for local techniques

This cluster contains:

• Scanning probe microscope ultra-high vacuum module (UHV SPM) Module
• Focused ion beams ultra-high vacuum module (UHV FIB Module)
• Ultra-high vacuum module for local focused ion beams implantations (FIB Imp Module)
• Face-up loading module for local techniques (FUL module)
• Ultra-high vacuum radial distribution center/module (RDC module)
   

   This cluster allows using focused ion beams in the conditions of high vacuum, which provides the highest level of clearness of the structures fabricated.

   The presence of a UHV SPM provides control of the structures fabricated with sub-nanometer resolution.

• Cluster overall dimensions - 300х470 cm.