NTEGRA platform: NTEGRA Aura: Specification

Scanning probe Microscopy
STM/ AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Phase Imaging/Force Modulation/ Adhesion Force Imaging/ Magnetic Force Microscopy/ Electrostatic Force Microscopy/ Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Force and Current), STM
Specification		Scan type
		Scanning by sample	Scanning by probe^*
Sample size		Up to 40 mm in diameter, to 15 mm in height	Up to 100 mm in diameter, up to 15 mm in height
Sample weight		Up to 100 g	Up to 300 g
XY sample positiniong range		5x5 mm
Positioning resolution		readable resolution-5 um sensitivity-2 um
Scan range		100x100x10 um 3x3x2,6 um	100x100x10 um 50x50x5 um
		Up to 150x150x15 um^**(DualScan^TMmode)
Non linearity, XY (with closed loop sensors)		0.1%	0.15%
Noise level, Z (RMS in bandwidth 1000Hz)	With sensors	0.04 nm (typically), 0.06 nm	0.06 nm (typically), 0.07 nm
	Without sensors	0.03 nm	0.05 nm
Noise level, XY^*** (RMS in bandwidth 200Hz)	With sensors	0.2 nm (typically), 0.3 nm (XY 100 um)	0.1 nm (typically), 0.2 nm
	Without sensors	0.02 nm (XY 100 um), 0.001 nm (XY 3 um)	0.01 nm
Closed-Loop Equivalent^TM	Noise level, XY (RMS in bandwidth 200Hz)	0.012 nm (XY 3 um)
	Noise level, Z (RMS in bandwidth 1000 Hz)	0.02 nm
	Zoom accuracy	5% typically
Optical viewing system	Optical resolution	1 um	3 um
	Field of view	4.5-0.4 mm	2.0-0.4 mm
	Continuous zoom	available	available
Temperature control	Range	From RT to +150^oC
	Stability	±0.005°C (typically), ±0.01°C
Vacuum system	Pressure	10^-2Torr
Vibration isolation	Active	0.7-1000 Hz
	Passive	above 1 kHz

* Scanning head can be configured to serve as a stand-alone device for specimens of unlimited sizes.
** Optionally can be expanded to 200x200x20 мm.
*** Built-in capacitive sensors have extremely low noise and any area down to 50x50 nm can be scanned with closed-loop control.