NTEGRA platform: NTEGRA Vita: Specification
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Scanning probe microscopy
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| SPM methods |
in air & liquid
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AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Adhesion Force Imaging/ Force Modulation/ Phase Imaging/ AFM Lithography (scratching)/ Force-Distance curves
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in air only
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STM/ Magnetic Force Microscopy/ Electrostatic Force Microscopy / Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Current), STM
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Scanning by sample
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Scanning by probe*
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| Sample size |
in air
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40 mm in diameter,
15 mm in height
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100 mm in diameter,
15 mm in height
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in liquid
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Up to 14x14x2.5 mm
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Up to 15x15x3 mm
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| XY sample positioning range |
in air
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5x5 mm, readable resolution-5 um
sensitivity-2 um
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in liquid
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1x1 mm, readable resolution-5 um
sensitivity-2 um
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| Scan range |
100x100x10 um, 3x3x2.6 um
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100x100x10 um, 50x50x5 um
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Up to 200x200x20 um** (DualScanTM mode)
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| Non-linearity, XY (with closed-loop sensors***) |
<0.1%
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<0.15%
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| Noise level, Z (RMS in bandwidth 1000 Hz) |
With sensors |
0.04 nm (typically),
 0.06 nm
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0.06 nm (typically),
0.07 nm
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| Without sensors |
0.03 nm
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0.05 nm
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| Noise level, XY***(RMS in bandwidth 200 Hz) |
With sensors |
0.2 nm (typically),
 0.3 nm (XY 100 um)
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0.1 nm (typically),
0.2 nm (XY 50 um)
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| Without sensors |
0.02 nm (XY 100 um)
0.001 nm (XY 3 um)
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0.01 nm (XY 50 um)
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Temperature control
(For operation in fluid environment) |
Range
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-
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from RT to 60°C
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Stability
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-
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±0.005°C (typically),
±0.01°C
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*Scanning head can be configured to serve as a stand-alone device for specimens of unlimited sizes.
** 200 мm scan range is possible with the unique DualScan™ mode when scanning by sample and scanning by probe can be done simultaneously.
*** Built-in capacitive sensors have extremely low noise and any area down to 50x50 nm can be scanned with closed-loop control.
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Optical microscopy*
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Upright viewing
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Inverted viewing Scanning by probe
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Scanning by sample
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Scanning by probe
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| Objective lens |
Magnification |
x1/ x10
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x1
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x60**
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| Numerical aperture |
0.1/ 0.28
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0.1
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0.7
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Continuous zoom
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available
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NA
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| Observation methods*** |
Bright field imaging |
available
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available
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| Fluorescence imaging |
NA
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optional
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| Contrast methods |
Phase contrast imaging,
Polarization, DIC
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NA |
optional
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* System upgrade is possible to convert it into a near-field optical microscope or a laser confocal microscope.
** Any additional objectives can be supplied optionally.
*** Can be performed without compromise in optical or AFM performance.
