NTEGRA platform: NTEGRA Maximus: Specification
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Scanning Probe Microscopy
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| AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Phase Imaging/Force Modulation/ Adhesion Force Imaging/ Magnetic Force Microscopy/ Electrostatic Force Microscopy / Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Force and Current) |
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Specification
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| Sample size |
Up to 100 mm in diameter, up to 15 mm in height
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| Sample weight |
Up to 1 kg
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XY sample positiniong range
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Linear movement range |
50 mm
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| Positioning resolution |
2.5 um
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| Rotary movement range |
360°
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| Positioning resolution |
0.005°
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| Scan range |
100x100x10 um
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| Sample holder |
Vacuum chuck
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Non-linearity, XY
(with closed-loop sensors) |
 0.15%
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Noise level, Z
(RMS in bandwidth 1000Hz) |
With sensors
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0.06 nm (typically),  0.07 nm
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Without sensors
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0.05 nm
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Noise level, XY*
(RMS in bandwidth 200Hz) |
With sensors
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0.1 nm (typically), 0.2 nm
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Without sensors
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0.01 nm
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| Linear dimension estimation error (with sensors) |
±0.5%
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| Optical viewing system |
Optical resolution
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1 um/3 um
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Field of view
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4.5-0.4 mm
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Continuous zoom
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available
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Vibration isolation
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Active
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0.7-1000 Hz
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Passive
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above 1 kHz
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* Built-in capacitive sensors have extremely low noise and any area down to 50x50 nm can be scanned with closed-loop control.
