NTEGRA platform: NTEGRA Spectra: Specification

Confocal microscopy
Optical module	Inverted or upright microscope direct viewing system
	Housing with VIS optics (390-800nm)
	Polarizer in illuminator channel with Glan-Taylor prism 390-1000nm – manual
	Polarizer in detection channel with Glan-Taylor prism 390-1000nm – motorized
	1/2 wave plate, motorized – 3 position
	Beam splitter
	Evanescent excitation option (for TERS)
Optical resolution	XY	200nm
	Z	500nm
Scanning module	Sample weight	Up to 1000g
	Scanning range	100x100x25 um
	Closed-loop operation	Capacitive sensors for 3 axes
	Non-linearity, XY	0.03 % (typically)
	Noise level, Z	<0.2 nm (typically)
	Noise level, XY	<0.5 nm (typically)
Pinhole		Variable from 0 to 1,5 mm, step size 0,5 um

Note that the sample for confocal microscopy can be either transparent or not and can be observed in air as well as in liquid environment.

Spectroscopy
Spectrometer focal length	520 mm
Laser wavelength*	441, 488, 514, 532, 633 nm
Stray light rejection	10^-5 measured at 20 nm from 632 laser line
Flat field	28 mm x 10 mm
Spectral resolution	0.025 nm (1200 l/mm grating**)
Ports	1 input, 2 output
Grating mounts	4-position turret (3 gratings+mirror for "direct imaging" mode)
Detectors	CCD	Spectral response 200–1000 nm, thermoelectric cooling down to –80°C, 95 % quantum efficiency at 500 nm
	Avalanche photodiode for photon counting***	Spectral response 400–1000 nm, dark counts = 25 counts/sec, supplied with PCI board with 1 GHz counting speed

* Basic configuration includes 488 nm laser, additional lasers can be supplied optionally
** Additional gratings can be supplied optionally. Echelette gratings are available for the highest spectral resolution.
***PMT can be installed instead of APD

Scanning Near-Field Microscopy
Shear Force Microscopy / SNOM reflection, transmission, luminescence(optinal)
Laser module	Coupling unit	X-Y-Z positioner, positioning accuracy 1 um
		V-groove fiber holder
		Coupling 40x objective
		Fiber Delivery System KineFlex
	Beam attenuator	Variable neutral density filter
Shear Force Imaging	Sample size	Up to diameter 100mm, up to 15 mm in height
	XY sample positioning range	5x5 mm
	Sample positioning resolution	5 um
	Closed-loop operation	Capacitive sensors for 3 axes
		Scanning by sample	Scanning by probe
	Scan range	100x100x25 um	100x100x7 um
	Non-linearity, XY	0.03 % (typically)	<0.15%
	Noise level, Z	<0.2 nm (typically)	0.04 nm (typically),<=0.06 nm
	Noise level, XY	<0.5 nm (typically)	0.2 nm (typically), <=0.3 nm
	Quartz tuning fork base frequency	190 kHz
	Aperture diameter	<100nm
Channels for simultaneous registration		Reflection
		Transmission/Fluorescence
PMT detectors for each channel	Spectral response	185-850 nm
	Sensitivity at 420 nm	3x10¹⁰
Vibration isolation	Dinamic	0.7-1000 Hz
	Passive	above 1 kHz
Scanning probe microscopy
AFM (contact+semi-contact+non-contact)/Lateral Force Microscopy/Phase Imaging/Force Modulation/Adhesion Force Imaging/Magnetic Force Microscopy/Electrostatic Force Microscopy/Scanning Capacitance Microscopy/Kelvin Probe Microscopy/Spreading Resistance Imaging/Lithography: AFM (Force and Current)
Sample size*		Up to diameter 100mm, up to 15 mm in height
Scan range		50x50x5 um
Closed-loop operation**		Capacitive sensors for 3 axes
Non-linearity, XY		<0.15%
Noise level, Z		0.06 nm (typically), <=0.07nm
Noise level, XY		0.1 nm (typically), <=0.2 nm (XY 50 um)

*Scanning head can be configured to serve as a stand-alone device for specimens of untimited sizes
**Built-in capacitive sensors have extremely low noise and area down to 50x50 nm can be scanned with closed-loop control.