NTEGRA platform: NTEGRA Therma: Specification
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Scanning probe Microscopy
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| STM/ AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Phase Imaging/Force Modulation/ Adhesion Force Imaging/ Magnetic Force Microscopy/ Electrostatic Force Microscopy/ Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Force and Current), STM |
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Specification
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Scan type
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Scanning by sample
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Scanning by probe*
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| Sample size |
Ambient environment
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Up to 40 mm in diameter,
to 15 mm in height
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Up to 100 mm in diameter,
up to 15 mm in height
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Heating or cooling
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10x10x1.5 mm
15x12x1.5 mm
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Up to 15x17x1.5 mm
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| XY sample positiniong range |
5x5 mm
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| Positioning resolution |
readable resolution-5 um
sensitivity-2 um
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Temperature control
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Range
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From -30°C
to +80°C/RT – +150 C
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From RT to 300°C
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Stability
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±0.005 (typically),
 ±0.01°C
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±0.01°C (typically),
±0.02°C
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Scan range
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-30°C - +80°C
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10x10x5 um
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-
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Ambient conditions/
RT - +150°C
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100x100x10 um
3x3x2.6um
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50x50x5um
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RT - +300°C
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-
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50x50x5um
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DualScan™ mode
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Up to 150x150x15 um** (DualScan™ mode)
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Thermal drift***
(tipically)
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XY
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15 nm/°C
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Z
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10 nm/°C
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Non linearity, XY
(with closed loop sensors) |
0.1%
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0.15%
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Noise level, Z
(RMS in bandwidth 1000Hz) |
With sensors
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0.04 nm(typically),
 0.06 nm
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0.06 nm(typically),
0.07 nm
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Without sensors
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0.03 nm
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0.05 nm
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Noise level, XY****
(RMS in bandwidth 200Hz) |
With sensors
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0.2 nm (typically),
0.3 nm (XY 100 um)
0.025 nm(typically),
0.04 nm (XY 10 um)
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0.1 nm (typically),
0.2 nm
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Without sensors
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0.02 nm(XY 100 um),
0.002 nm(XY 10 um),
0.001 nm (XY 3 um)
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0.01 nm
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| Linear dimension estimation error(with sensors) |
±0.5%
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±1.2%
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| Optical viewing system |
Optical resolution
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1 um/3 um
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3 um
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Field of view
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4.5-0.4 mm
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2.0-0.4 mm
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Continuous zoom
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available
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available
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Vibration isolation
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Active
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0.7-1000 Hz
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Passive
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above 1 kHz
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* Scanning head can be configured to serve as a stand-alone device for specimens of unlimited sizes.
** Optionally can be expanded to 200x200x20 мm.
*** For temperature range –30°C – +80°C
**** Built-in capacitive sensors have extremely low noise and any area down to 50x50 nm can be scanned with closed-loop control.
