|
|
|
NTEGRA platform: NTEGRA Aura: Key features
- measurements with no negative effect of surface adsorbed substance
- high sensitivity of two-pass methods owing to the increased Q-factor in vacuum
- full range of electric and magnetic methods (SRI, SCM — contact and non-contact, SKM, MFM, PFM, EFM, DFM)
- motorized X,Y positioning
- closed loop control with the lowest self-induced noise level is suitable for work on very small fields (<100 nm)
- possibility of expanding functionality
|
|
