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NTEGRA platform: NTEGRA Aura
- measurements with no negative effect of surface adsorbed substance
- high sensitivity of two-pass methods owing to the increased Q-factor in vacuum
- full range of electric and magnetic methods (SRI, SCM — contact and non-contact, SKM, MFM, PFM, EFM, DFM)
- motorized X,Y positioning
- closed loop control with the lowest self-induced noise level is suitable for work on very small fields (<100 nm)
- possibility of expanding functionality
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