NTEGRA platform: NTEGRA Aura

General information Key features Technical characteristics Applications Optional features Configurations Video presentation Information brochure (1.20 Mb)

• measurements with no negative effect of surface adsorbed substance
• high sensitivity of two-pass methods owing to the increased Q-factor in vacuum
• full range of electric and magnetic methods (SRI, SCM — contact and non-contact, SKM, MFM, PFM, EFM, DFM)
• motorized X,Y positioning
• closed loop control with the lowest self-induced noise level is suitable for work on very small fields (<100 nm)
• possibility of expanding functionality