NTEGRA platform: NTEGRA Prima

In air&liquid : AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Phase Imaging/ Force Modulation/ Adhesion Force Imaging/ Lithography: AFM (Force) 

Up to 40 mm in diameter, 
to 15 mm in height

Up to 100 mm in diameter,
up to 15 mm in height

Up to 100 g

Up to 300 g

5x5 mm

readable resolution - 5 um
sensitivity - 2 um

Scan range

100x100x10 um
3x3x2,6 um
Less than 1x1x1um

100x100x10 um
50x50x5 um

Up to 200x200x20 um^**(DualScan^TMmode)

0.1%

0.15%

With sensors

0.04 nm (typically),
0.06 nm

0.06 nm (typically),
0.07 nm

Without sensors

0.03 nm

0.05 nm

With sensors

0.2 nm (typically),
0.3 nm (XY 100 um)

0.1 nm (typically),
0.2 nm (XY 50 um)

Without sensors

0.02 nm (XY 100 um),
0.001 nm (XY 3 um)

0.01 nm (XY 50 um),

±0.5%

±1.2%

Optical resolution

1 um
(0.4 um optional, NA 0.7)^****

3 um

Field of view

4.5-0.4 mm

2.0-0.4 mm

Continuous zoom

available

available

Vibration isolation

Active

 0.7-1000 Hz

Passive

above 1 kHz