NTEGRA platform: NTEGRA Aura
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Scanning probe Microscopy
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| STM/ AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Phase Imaging/Force Modulation/ Adhesion Force Imaging/ Magnetic Force Microscopy/ Electrostatic Force Microscopy/ Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Force and Current), STM |
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Technical characteristics
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Scan type
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| Scanning by sample |
Scanning by probe* |
| Sample size |
Up to 40 mm in diameter,
up to 15 mm in height
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Up to 100 mm in diameter,
up to 15 mm in height
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| Sample weight |
Up to 100 g
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Up to 300 g
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| XY sample positiniong range |
5x5 mm
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| Positioning resolution |
readable resolution - 5 um
sensitivity - 2 um
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Scan range
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100x100x10 um
3x3x2,6 um
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100x100x10 um
50x50x5 um
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Up to 150x150x15 um**(DualScanTMmode)
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Non linearity, XY
(with closed loop sensors) |
 0.1% |
0.15% |
Noise level, Z
(RMS in bandwidth 1000Hz) |
With sensors
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0.04 nm (typically),
0.06 nm |
0.06 nm (typically),
0.07 nm |
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Without sensors
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0.03 nm
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0.05 nm
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Noise level, XY***
(RMS in bandwidth 200Hz) |
With sensors
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0.2 nm (typically),
0.3 nm (XY 100 um) |
0.1 nm (typically),
0.2 nm |
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Without sensors
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0.02 nm (XY 100 um),
0.001 nm (XY 3 um)
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0.01 nm
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| Optical viewing system |
Optical resolution
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1 um
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3 um
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Field of view
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4.5-0.4 mm
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2.0-0.4 mm
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Continuous zoom
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available
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available
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Temperature control
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Range
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From RT to +150oC
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Stability
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±0.005°C (typically), ±0.01°C |
| Vacuum system |
Pressure
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10-2Torr
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Vibration isolation
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Active
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0.7-1000 Hz
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Passive
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above 1 kHz
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* Scanning head can be configured to serve as a stand-alone device for specimens of unlimited sizes.
** Optionally can be expanded to 200x200x20 um.
*** Built-in capacitive sensors have extremely low noise and any area down to 50x50 nm can be scanned with closed-loop control.
