NTEGRA platform: NTEGRA Vita

Scanning probe microscopy
SPM methods	in air & liquid	AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Adhesion Force Imaging/ Force Modulation/ Phase Imaging/ AFM Lithography (scratching)/ Force-Distance curves
	in air only	STM/ Magnetic Force Microscopy/ Electrostatic Force Microscopy / Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Current), STM
		Scanning by sample	Scanning by probe*
Sample size	in air	40 mm in diameter, 15 mm in height	100 mm in diameter, 15 mm in height
	in liquid	Up to 14x14x2.5 mm	Up to 15x15x3 mm
XY sample positioning range	in air	5x5 mm, readable resolution - 5 um sensitivity - 2 um
	in liquid	1x1 mm, readable resolution-5 um sensitivity-2 um
Scan range		100x100x10 um, 3x3x2.6 um	100x100x10 um, 50x50x5 um
		Up to 200x200x20 um** (DualScan^TM mode)
Non-linearity, XY (with closed-loop sensors***)		<0.1%	<0.15%
Noise level, Z (RMS in bandwidth 1000 Hz)	With sensors	0.04 nm (typically), 0.06 nm	0.06 nm (typically), 0.07 nm
	Without sensors	0.03 nm	0.05 nm
Noise level, XY***(RMS in bandwidth 200 Hz)	With sensors	0.2 nm (typically), 0.3 nm (XY 100 um)	0.1 nm (typically), 0.2 nm (XY 50 um)
	Without sensors	0.02 nm (XY 100 um) 0.001 nm (XY 3 um)	0.01 nm (XY 50 um)
Temperature control (For operation in fluid environment)	Range	-	from RT to 60°C
	Stability	-	±0.005°C (typically), ±0.01°C

*Scanning head can be configured to serve as a stand-alone device for specimens of unlimited sizes.
** 200 мm scan range is possible with the unique DualScan™ mode when scanning by sample and scanning by probe can be done simultaneously.
*** Built-in capacitive sensors have extremely low noise and any area down to 50x50 nm can be scanned with closed-loop control.

Optical microscopy*
		Upright viewing		Inverted viewing Scanning by probe
		Scanning by sample	Scanning by probe
Objective lens	Magnification	x1/ x10	x1	x60**
	Numerical aperture	0.1/ 0.28	0.1	0.7
Continuous zoom		available		NA
Observation methods***	Bright field imaging	available		available
	Fluorescence imaging	NA		optional
	Contrast methods	Phase contrast imaging, Polarization, DIC	NA	optional

* System upgrade is possible to convert it into a near-field optical microscope or a laser confocal microscope.
** Any additional objectives can be supplied optionally.
*** Can be performed without compromise in optical or AFM performance.