NTEGRA platform: NTEGRA Maximus
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Scanning Probe Microscopy
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| AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Phase Imaging/Force Modulation/ Adhesion Force Imaging/ Magnetic Force Microscopy/ Electrostatic Force Microscopy / Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Force and Current) |
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Specification
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| Sample size |
Up to 100 mm in diameter, up to 15 mm in height |
| Sample weight |
Up to 1 kg |
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XY sample positiniong range
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Linear movement range |
50 mm |
| Positioning resolution |
2.5 um |
| Rotary movement range |
360° |
| Positioning resolution |
0.005° |
| Scan range |
100x100x10 um |
| Sample holder |
Vacuum chuck |
Non-linearity, XY
(with closed-loop sensors) |
 0.15% |
Noise level, Z
(RMS in bandwidth 1000Hz) |
With sensors |
0.06 nm (typically),  0.07 nm |
| Without sensors |
0.05 nm |
Noise level, XY*
(RMS in bandwidth 200Hz) |
With sensors |
0.1 nm (typically), 0.2 nm |
| Without sensors |
0.01 nm |
| Linear dimension estimation error (with sensors) |
±0.5% |
| Optical viewing system |
Optical resolution |
1 um/3 um |
| Field of view |
4.5-0.4 mm |
| Continuous zoom |
available |
| Vibration isolation |
Active |
0.7-1000 Hz |
| Passive |
above 1 kHz |
* Built-in capacitive sensors have extremely low noise and any area down to 50x50 nm can be scanned with closed-loop control.
