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NTEGRA platform: NTEGRA Therma

Scanning probe Microscopy
STM/ AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Phase Imaging/Force Modulation/ Adhesion Force Imaging/ Magnetic Force Microscopy/ Electrostatic Force Microscopy/ Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Force and Current), STM
Technical characteristics		Scan type
		Scanning by sample	Scanning by probe^*
Sample size	Ambient environment	Up to 40 mm in diameter, to 15 mm in height	Up to 100 mm in diameter, up to 15 mm in height
	Heating or cooling	10x10x1.5 mm 15x12x1.5 mm	Up to 15x17x1.5 mm
XY sample positiniong range		5x5 mm
Positioning resolution		readable resolution - 5 um sensitivity - 2 um
Temperature control	Range	From -30°C to +80°C/RT – +150 C	From RT to 300°C
	Stability	±0.005 (typically), ±0.01°C	±0.01°C (typically), ±0.02°C
Scan range	-30°C - +80°C	10x10x5 um	-
	Ambient conditions/ RT - +150°C	100x100x10 um 3x3x2.6um	50x50x5 um
	RT - +300°C	-	50x50x5 um
	DualScan™ mode	Up to 150x150x15 um** (DualScan™ mode)
Thermal drift*** (tipically)	XY	15 nm/°C
	Z	10 nm/°C
Non linearity, XY (with closed loop sensors)		0.1%	0.15%
Noise level, Z (RMS in bandwidth 1000Hz)	With sensors	0.04 nm(typically), 0.06 nm	0.06 nm(typically), 0.07 nm
	Without sensors	0.03 nm	0.05 nm
Noise level, XY^**** (RMS in bandwidth 200Hz)	With sensors	0.2 nm (typically), 0.3 nm (XY 100 um) 0.025 nm(typically), 0.04 nm (XY 10 um)	0.1 nm (typically), 0.2 nm
	Without sensors	0.02 nm(XY 100 um), 0.002 nm(XY 10 um), 0.001 nm (XY 3 um)	0.01 nm
Linear dimension estimation error(with sensors)		±0.5%	±1.2%
Optical viewing system	Optical resolution	1 um/3 um	3 um
	Field of view	4.5-0.4 mm	2.0-0.4 mm
	Continuous zoom	available	available
Vibration isolation	Active	0.7-1000 Hz
	Passive	above 1 kHz

* Scanning head can be configured to serve as a stand-alone device for specimens of unlimited sizes.
** Optionally can be expanded to 200x200x20 мm.
*** For temperature range –30°C – +80°C
**** Built-in capacitive sensors have extremely low noise and any area down to 50x50 nm can be scanned with closed-loop control.