|
Scanning probe microscopy
|
| in-situ: AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Phase Imaging/Force Modulation/ Adhesion Force Imaging/ Magnetic Force Microscopy/ Electrostatic Force Microscopy / Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Force and Current) |
| Sample size |
Up to 8 mm in diameter,
up to 15 mm in height |
| Sample weight |
Up to 10 g |
| Scan range |
50x50x5 um |
| Positioning resolution |
readable resolution - 5 um
sensitivity - 2 um |
| Non-linearity, XY |
<0.15% |
| Noise level, Z (RMS in bandwidth 1000 Hz) |
0.06 nm (typically),  0.07 nm |
| Noise level, XY (RMS in bandwidth 200 Hz) |
0.1 nm (typically),  0.2 nm |
| Vibration isolation |
Dynamic |
Frequency range 0.7 – 1000 Hz |
| Passive |
For frequencies above 1 kHz |
