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Parameters
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Type of scanning
|
|
Scanning by sample
|
Scanning by probe
|
|
Sample size
|
Up to 40x40х10 mm
Up to 12x12x2 mm
with the liquid cell use
|
Up to 100x100х20 mm and unlimited for measuring head used for stand alone operation
|
|
Scanners
|
3x3x2.6 um (±10%);
10x10x4 um (±10%),
50x50x5 um (±10%)
|
50x50x5 um (±10%);
100x100x7 um (±10%);
100x100x10 um (±10%) (only for Shear Force)
|
|
Min. scanning step(DAC)
|
0.0004 nm;
0.0011 nm;
0.006 nm
|
0.006 nm;
0.012 nm;
0.012 nm
|
| SPM heads |
|
|
AFM
STM: 30 pA-50 nA, RMS noise 4 pA
(standard preamplifier);
10 pA-5 nA, PMS noise 1.5 pA
(low current preamplifier)
|
AFM
Shear Force
|
| Optical viewing system |
|
Resolution
Numerical aperture
CCD
Horizontal field of view
|
1 um
0.28
от 230x до 2900x
от 1.2 до 0.1 mm
|
|
XY sample positioning
|
5х5 mm
|
|
Positioning resolutin
|
readable resolution - 5 um
sensitivity - 2 um
|
|
Heating
|
130 С
|
|
Vibration isolation
|
Active vibration isolation system:
Active damping (0.6-100 Hz),
>100 Hz - passive damping
Electric shielding and acoustic isolation is provided by the special cast metall hood
|
