|
Specification
|
| Vacuum value |
5*10-8 Torr |
| Pumps |
Combination of oil-free high-pressure vacuum pump and turbo-molecular pump with magnetic suspension |
| Oil-free high-pressure vacuum pump speed |
13 m3/hour |
| Turbo-molecular pump speed |
365 l/sec |
| Temperature range |
Cooling: helium down to 50K, nitrogen down to 110K
Heating: up to 150°C |
| Environment control |
Possibility to treat sample surface by plasma; use of non-aggressive gases (such as O2, H2, etc.) |
| Sample size |
~10x10mm |
| Scan range |
100x100x10 µm |
| Magnetic field |
With spade terminals- up to 1,2 kilogauss, with pole terminals - up to 2 kilogauss |
