NANOFAB 100 platform: RDC module
UHV radial distribution module is an ideal tool for connecting technological and analytical modules. The system consists of ultra-high vacuum chamber, UHV system, precision manipulator with sample holder, stepper motor drives with reducers used for rotary and linear motions which make it possible to achieve high repositioning accuracy in both linear and rotary coordinates.
Modules can be integrated in cluster due to the adjusting control system for manipulator allowing initial alignment of distribution between chambers and saving of endpoint in computer memory. It is necessary for automatic working mode.
Vacuum chamber includes viewports for motion control and 6 docking ports. The main parts of UHV system are an ion pump, vacuometers and controller.
