NANOFAB 100 platform: PLD module
Pulsed Laser Deposition is a multipurpose, universal technique used to apply thin films of various materials. Milling of the target substance, which is applied to the substrate, by laser pulses lies in the basis of this method.
The automated targets reload system makes it possible to apply multilayer structures on substrates of up to 100 mm diameter. A built-in High Pressure RHEED system provides in-situ control for the film growth processes.
This module is characterised with high functionality, relative simplicity in maintenance, easy switching between various technology processes and with high homogeneousness of the films fabricated. All these features make the PLD module a perfect machine both for research and for production applications.
