NANOFAB 100 platform: FIB Imp module
Automated FIB Imp module is an efficient tool for implantation the ions into materials and easy analysis. The central element is a focused ion beam column with magnetic separator. It is possible to focus the ions over a dedicated area by using as an ion source one of the alloys (AuSi, AuGe, AuGeSi, CoNd, CoGe, ErNi, ErFeNiCr, NiB, GaIn, BPt, AuBeSi, AuFeGe, AuGeMn). Wien filter for selection the ion source is a part of ion beam column. Module is optimally isolated by active anti-vibration system counteracted mechanical vibrations in a wide range of frequencies.
Module can be extended with SEM column providing high resolution imaging and SIMS system.
