NANOFAB 100 platform: UHV FIB module

General information Overall dimensions 3D model

UHV FIB module is a complete instrument designed for modification and analysis of nanostructures up to 100 nm by means of ion beam cutting and milling. Milling cutter with a diameter 10-20 µm is ideal for NEMS and MEMS prototyping. Module is optimally isolated by active anti-vibration system counteracted mechanical vibrations in a wide range of frequencies. 

Module can be extended with SEM column providing high resolution imaging and SIMS system.