NANOFAB 100 platform: Modules for batch technologies

Modules for batch techniques are intended to perform technology processes simultaneously over the whole surface of the substrate. They include the processes of deposition, etching and growth. Amongst those are:

• Pulsed laser deposition module - PLD module
   
• Plasma etching module - PE module
   
• Plasma enhanced deposition module - PED module
   
• Plasma cleaning module - PC module
   
• GaAs molecular beam epitaxy module - MBE GaAs module
   
• GaN molecular beam epitaxy module - MBE GaN module