NANOFAB 100 platform: Modules for nanolocal technologies

Modules for local techniques are intended for processes of sequential local modifications of surfaces with the use of ion beams and tip probes, including the growth processes, etching, deposition, implantation etc. Amongst those are:

• Focused ion beams ultra-high vacuum module - UHV FIB module
   
• Ultra-high vacuum module for local focused ion beam implantations - FIB Imp module
   
• Focused ion beams ultra-high vacuum module with a system of gas injectors FIB CVD module
   
• Ultra-high vacuum module with a scanning probe microscope and a system of gas injectors - GIS SPM module