NANOFAB 100 platform: FIB modules

Modules with Focused Ion Beam columns, FIB modules, are amongst the main modules of the NANOFAB 100 platform. They are intended for technology procedures that involve focused ion beams. Amongst those: local milling, cutting, visualization of nano-elements and nano-structures, ion implantation, local growth, surface cleaning of semi-conductive substrates etc.

High degree of automation and the precision coordinate-linked substrate positioning system installed in the FIB and SPM modules ensure precision (µm) matching between areas of the sample processed by ion beam in the FIB module and those investigated or treated in the SPM modules.

Combination in one chamber of FIB techology and  SEM allows to receive information about objects, during their in situ modification by means of deposition or removing of the material. Modifying the surface of the sample by focused ion beam, we can simultaneously receive an image of the surface by means of electron beam.

Three types of FIB modules are contained in the NANOFAB 100 platform : ultra-high vacuum UHV FIB module, FIB GIS module with an inlet system for vapours of organic compositions, and a module for nano-local implantations FIB Imp. Therefore the FIB modules can provide almost all significant "top-down" and "bottom-up" FIB techniques.