NANOFAB 25 platform: UHV XPS module
The electron-ion spectroscopy (EIS) module serves for analysis of samples of dimensions up to 10×10×8 mm under UHV (down to 1.2×10-10 mbar) conditions. The module provides research with a number of spectroscopic techniques, including X-ray and ultraviolet photoelectron spectroscopy, Auger spectroscopy, and ion-scattering spectroscopy. These techniques are useful in various fields (micro- and nanoelectronics, optoelectronics, analysis of nanomaterials and storage media, applied chemistry, physical-chemical analysis, materials engineering etc.).
The core of the module is a spectrometer of electron energy losses which is capable to register reflected electrons of energy up to 15 keV from a selected sample area.
