Nanotechnology facilities NANOFAB 100
Analytical technological systems NANOFAB 25
Processing equipment
AFM and SPM systems
 
Modules
PECVD UHV XPS RDC

Module RDC

General information

The radial distribution module connects other modules of a nanotechnology facility based on NANOFAB 25 platform. Layout with this module allows to transport the sample between modules of the facility without admitting air into the working chamber thus providing atomic surface purity required by nanotechnology. Distribution of samples between nodes of the facility is performed by a manipulator.   For visual inspection, the vacuum chamber of the module is equipped with viewing ports.

For operation, 6 docking ports are available around the vacuum chamber. Every of the docking ports is designed to attach a separate module (maybe, another distribution module).

 
 
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