NT-MDT Co. has been launching new platform of nanotechonology

02.07.2009

NT-MDT Co. has been launching new platform of nanotechonology complexes for research and small series production of micro- and nano-electro-mechanical systems (MEMS\NEMS). NANOFAB 25 incorporates conceptual advantages of NANOFAB 100 platform, such as cluster arrangement of technological modules, extremely high precision of the whole-complex transporting system etc. As against NANOFAB 25 is dedicated for substrates of 25 mm in diameter. This allows to make the complex more compact and more fast. NANOFAB 25 complexes are mainly developed for research purposes as analytical modules have been integrated into the system along with many technological modules.