NANOFAB 100 platform
NanoFab 100 is a modular platform, which is developed to assemble nanotechnology facilities (NTF) with the cluster arrangement of their modules, including systems that are capable of treating substrates as big as 100 mm using batch and local techniques. The NTF clusters are linked into the technology chain by means of special intermediate modules, which are used both to transport and to store samples. All this makes it possible to assemble “Nano Factories” to fabricate fully functional nano-structures, nano-devices and nano-systems.
