|
Technical characteristics
|
| Scanning system |
|
| Scanning |
by sample |
| Scan range XY, μm |
better than 100 |
| Scan range Z, μm |
better than 10 |
| Min. scanning step |
2 Å |
| RMS deviation of the linear dimensions measurements in XY plane |
less than 5% |
| RMS deviation of the linear dimensions measurements in Z-direction |
less than 5% |
| Resolution |
|
| Resolution in XY plane |
no more than 50 nm |
| Resolution in Z-direction |
no more than 2 nm |
| Maximum number of scanning points in X- and Y-directions |
1024х1024 |
| Scan non-linearity in XY plane in nm, less |
30 |
| Scan non-orthogonality in XY plane in deg, less |
5 |
| Scan non-planarity in XY plane in μm, less |
500 |
| Drift in XY |
no more than 5 Å /sec |
| Drift in Z-direction |
no more than 5 Å /sec |
| AFM mode |
X_Y – 50 nm tipically, up to 10 nm with sharp tip and vibroisolation Z – 3 nm |
| STM mode |
X_Y – 10 nm, Z – 3 nm |
| Operating systems |
Mac OS and Windows XP |
| Sample |
|
| Sample size |
diameter up to 12 mm |
| Sample thickness |
up to 5 mm |
| Possibility of giving voltage across the sample |
yes |
| Mass and overall dimensions |
|
| Controller overall dimensions (length x width x height) in mm |
260х160х360 |
| Measuring head overall dimensions (length x width x height) in mm |
160х160х130 |
| Mass (as a unit) in kg, less |
8 |
| Probe characteristics |
|
| Material |
Tungsten wire D 100 – 150 μm |
| Tip curvature radius |
100 nm |
| Tip cone angle |
20–40° |
| Tip sharpening availability |
up to 10 nm |
| Probe is grounded |
|
| Optical system |
CCD camera for visual tip approach control |
| Compatibility with long focus optical microscope |
|
| Service conditions |
|
| Supply voltage of alternating current |
220(+10/-15%) V |
| Power consumption |
no more than 60 W |
| Ambient air temperature |
20±5 °С |
| Relative air humidity |
no more than 65±15 % |
| Atmospheric pressure |
760±30 mm Hg |
| Thermal drift |
no more than 1 °С per hour |
Vibration amplitude in the band of 1 1000 Hz |
no more than 0,5 µm |
