NANOFAB 100 platform: Applications
Fields of application of the NTF NANOFAB 100 cover almost all areas of the nanotechnology research and development that are linked with solid-body nano-materials, nano-structures and nano-devices. The spectrum of NANOFAB 100’s capabilities expands from fundamental research to the development of single technology methods and to modeling nano-electronics devices. In addition, the employed scheme of arrangement, the control system and the well-developed transport system of the NANOFAB 100 make it possible to use the NTF for low quantity production of nano-structures and nano-devices. The coordinate-linked system of substrate positioning makes it possible to create complex multicomponent 3D nano-devices by using sequential nanotechnology operations with the nanometer resolution. The NTF NANOFAB 100’s area of applications has especial significance for the development of modern silicon electronics, which has already become part of practical nano-electronics.