NANOFAB 100 platform: Structure
Broad capabilities of the NANOFAB 100 result from the thoroughly elaborated cluster arrangement scheme – a special ultra-high vacuum transportation robot provides all interconnections between modules united into a cluster. This minimizes the travel time required to transfer samples in between operations and, therefore, provides better preservation of their surfaces, which is crucial in nanotechnologies. The intermediate modules, which provide the process of translation of substrates, are equipped with rotation devices and they allow performing complex technology cycles, including batch and local processes. In addition they provide all necessary control, measurement and analytical procedures.
The intermodular transport system and intermediate modules, which are used to store substrates in between operations, allow a single NTF NANOFAB 100 to realize several nanotechnology cycles on different substrates simultaneously. Therefore several research groups can use the same NTF at once. Apart from modules, the NANOFAB 100 comprises separate auxiliary, control, measurement, and analytical devices. Those devices can be used with modules of NANOFAB 100 via special ports, available in the modules in a sufficient number. Modules of the NANOFAB 100 platform can operate both as an integral part of a NTF and autonomously. In some cases it is possible to run them using auxiliary loading devices or loading modules. NANOFAB 100 is an open and permanently developing platform – several modules based on newest techniques are being under development.
